What We Do

Hexisense makes gas sensors for vacuum systems based on gallium nitride semiconductor chips. Our first product, OxyGaN, is capable of measuring total pressures from 1 to 1E-5 mbar at the same time as oxygen partial pressures from 0.1 to 5E-7 mbar, even in the presence of a background gas.

Nothing like this tiny chip exists on the market today, but you can think of it as a pressure gauge combined with a single-channel residual gas analyzer: you measure pressure and safeguard against unwanted air leaks or contaminated gas lines while your live vacuum process is running, but without breaking your budget.

Please contact us to obtained detailed technical specifications, pre-purchase a development kit, or to sign up for our newsletter to stay up-to-date on the latest technical developments.


March 4, 2020: We are hiring for two positions in Lausanne, Switzerland. Please submit inquiries via the contact form.

  1. Microfabrication Process Engineer
  2. Chief Business Development Officer

February 17, 2020: Giovanni Santoruvo joins the team.

February 5, 2020: EPFL and Hexisense receive an Innobooster grant from the Gebert Rüf Stiftung.

January 29, 2020: La Fondation FIT awards Hexisense a Seed loan.

October 15, 2020: Hexisense moves into its offices in the EPFL Innovation Park.

October 7, 2020: Rita Therisod joins the team.

September 30, 2019: Hexisense Sàrl is incorporated in Lausanne.

September 24, 2019: EPFL News publishes an article on the underlying technology.


With more than 12 years’ experience in semiconductor processing and instrumentation, the Hexisense team can go all the way from nitride epitaxy to a finished product in 5 different languages.

Ian Rousseau, Ph.D.

Founder / Director

Rita Therisod, Ph.D.

R&D Engineer

Giovanni Santoruvo, Ph.D.

Electrical Engineer


This deep-tech start-up owes its existence to the early support from EPFL and the strong startup ecosystem in the Swiss Federation. Thank you!


Please contact us to learn more about how our gas sensors can improve your vacuum processes.

  • Phone:     +41 21 510 23 07
  • Address:   Hexisense Sàrl
  •      EPFL Innovation Park
         Chemin de la Raye 13
         1024 Ecublens, Switzerland


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    Photographs by Alain Herzog and Hoshii Design.